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Test / Measurements
(please specify in remarks/comments)


   





Subject
Epitaxy





Zn-diffusion
PECVD


Lapping/Polishing
RTA
Gold-plating
Scribe and break


Lithography




Etching






Metallization




Optical coating





Material system
InGaAsP/InP
AlGaAs/GaAs
AlInGaAs/InP
In(Al)GaP/GaAs
Other

SiO2
Si3N4
SiON



In bars
In chips
System
Contact alligner
Stepper
Grating
Material system
InGaAsP/InP
AlGaAs/GaAs
AlInGaAs/InP
In(Al)GaP/GaAs
Other

InGaAsP/InP
AlGaAs/GaAs
AlInGaAs/InP
In(Al)GaP/GaAs
Other
AR coating
HR coating






Single/Regrowth
Single Growth
Regrowth



















Dry/wet etch Dry etching
Wet etching



P-type/N-type p-type
n-type