Process Capabilities Foundry Services > Process Capabilities Coating Capabilities Etching Capabilities Other Capabilities
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Epitaxy/Regrowth Strained MQW |
MOVPE |
4 x Single wafer 2 x Multi wafer |
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Grating |
E-beam writing |
JEOL – JBX-9300FS |
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Lithography |
Wafer Stepper Contact Aligner |
ASML-PAS5500/100 Karl-Suss MA-6 & 8 |
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Wet Etch |
(Non) Selective |
Wet Benches |
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Dry Etch |
ICP / RIE C1 2 / Methane |
STS |
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Metallization |
Sputtering / E-gun PVD |
Unaxis/Veeco |
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Optical Coating |
Sputtering PVD |
Unaxis |