Epitaxial Growth
Foundry Services > Epitaxial Growth

Cedova has a wealth of experience in growing the material systems listed below. The reactors are also qualified for these material systems. The growth of 2" and 3" wafers is possible.

    Capabilities
  • Single and Multiwafer MOVPE reactors
  • InGaAs(P)/InP (1000 - 2000nm)
  • AlGaInAs/InP (1000 -2000nm)
  • AlGaAs/GaAs (750 - 880nm)
  • AlGaInP/GaAs (660 - 680nm)
  • p-type / n-type doping
  • (strained) layer MQW
  • Re-growth for gratings, mesa etc.
  • Selective epitaxy for integration